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Thermal properties and pressure-dependent elastic constants of cadmium stannate as a substrate for MEMS: An ab initio study
(Elsevier, 2023)
Silicon carbide (SiC) has become a suitable replacement to silicon as a substrate for manufacture of microelectromechanical systems (MEMS) that operate in harsh environmental conditions, owing to its better mechanical ...
Thermal properties and pressure-dependent elastic constants of cadmium stannate as a substrate for MEMS: An ab initio study
(Elsevier, 2023-02-15)
Silicon carbide (SiC) has become a suitable replacement to silicon as a substrate for manufacture of microelectromechanical systems (MEMS) that operate in harsh environmental conditions, owing to its better mechanical ...
Thermal properties and pressure-dependent elastic constants of cadmium stannate as a substrate for MEMS: An ab initio study
(North-Holland, 2023-02-15)
Silicon carbide (SiC) has become a suitable replacement to silicon as a substrate for manufacture of microelectromechanical systems (MEMS) that operate in harsh environmental conditions, owing to its better mechanical ...